The new Aerotech ABRX series: The air-bearing rotation axes with diameters of 100, 150 and 250 mm are particularly suitable for surface measurements in the nanometre range and also as an extension for the SMP measuring platform.
Aerotech, manufacturer of high-performance motion control and positioning systems, introduces the ABRX High-Performance Air-Bearing Stages, a new generation of air-bearing rotary tables. To meet maximum payload and form factor requirements for use as a single-axis positioner, as part of an integrated system or even an integrated machine, various ABRX rotary axes are available in diameters of 100, 150 and 250 mm. This makes them particularly suitable for exacting requirements in wafer inspection, high-precision metrology, optical inspection and manufacturing, and MEMS/nanotechnology device production. Aerotech will participate in the International Trade Fair for Quality Control in Stuttgart, Germany, on May 4-7,2021 (Hall 5, Booth 5218).
“The market demands increasingly stringent performance specifications, and so far, there are very few solutions available that can meet extreme accuracy requirements,” said Simon Smith, European Director of Aerotech. Either the precision of, for example, mechanically mounted rotary tables is not sufficient, or the available solutions are very expensive and determined by a large form factor, which in turn makes it difficult to integrate them into multi-axis movement platforms or machines. “We now support users from a wide range of industries who require the highest degree of precision with our newly developed air-bearing ABRX rotary axes. The large air bearing surfaces provide significantly better running accuracy than a mechanical or other commonly available air-bearing turntables. The implied benefit being most evident in applications that require exceptional flatness of movement. Also in terms of angular accuracy, load capacity and off-axis error movements, with ABRX, we surpass the specifications of even the best of the rest available on the market to date.
World’s most precise family of air-bearing rotary tables
In the case of the new ABRX series, these are rotary tables that are directly driven and can therefore achieve rotational speeds of up to 300 rpm .Another special feature is the air bearing design which minimises radial and axial errors, which are typically in the range of less than 25 nm. The errors types can be divided into synchronous and asynchronous: Synchronous are errors that occur periodically with the axis rotation. Here, users have the possibility to measure the deviation, store it and then compensate it via a Z-axis in axial direction or X-axis in radial direction or correct the measured values accordingly. Asynchronous errors, on the other hand, are to be considered more as position noise and cannot be compensated easily. By compensating the synchronous errors, however, the radial and axial errors can be reduced to well below 10 nm. This makes the ABRX series particularly suitable for surface measurements in the nanometre range and of course as an extension to the proven Aerotech SMP measuring platform.
Competitive advantages through increased throughput and improved output quality
“With ABRX, our users achieve the maximum positioning performance they need for their processes to gain a competitive advantage in their respective markets,” says Simon Smith. Parasitic error movements can be minimised as far as possible via the air-bearing rotary axes, so that the highest possible production quality can be achieved without extensive postprocessing. Fewer error movements also lead to significantly fewer uncertainties and fluctuations in the process. “In this way, users benefit from sustainably improved quality and thus also from increased throughput.”
Wide range of applications
The ABRX series is particularly suitable for high-precision test and inspection systems and surface measurement applications, including the measurement of roundness, flatness, form errors or other measured variables of profilometry. The rotary tables are also used in the field of medical technology, for example in X-ray or CT inspection applications or generally in precision manufacturing systems.
The benefits of the ABRX High-Performance Air-Bearing Stages at a glance:
- The high-precision position feedback results in improved positioning performance with high fidelity and speed stability
- The specially developed direct drive guarantees a minimal influence on the process accuracy.
- The increased load capacity enables users to move even larger payloads with extreme precision.
- The industry-leading motion performance for axial, radial, and tilt errors gives users all the tools they need to overcome difficult measurement, inspection, and manufacturing processes. It also minimises the need for post-processing, which ultimately leads to higher output quality and improved throughput.
- Suitable for mounting with a horizontal or vertical axis of rotation, the ABRX creates more flexibility in process design and machine integration.