Laser interferometric processes are suitable for measuring vibrations because they guarantee high precision, due to fact that the measurement results can be traced back to international length standard. The nano vibration analyser from SIOS GmbH works with in a non-contact mode, consisting of a laser interferometric vibrometer together with a microscope, and is used for the vibration analysis of MEMS and microstructures. The heart of the vibrometer is a Michelson interferometer with an optical-fiber coupling allowing for a relatively small sensor which is free from thermal effects of the laser. Used in conjunction a standard laboratory microscope, it forms a high-performance setup for measuring both the displacement and frequency of MEMS, micro-objects and cantilevers vibrations.
According to SIOS GmbH, this device has a displacement resolution of less than 0.1 nm and a dynamic frequency measuring range from 0 to 2 MHz. Interchangeable objectives enable the laser spot diameter and the working distance to the object to be optmised. For example, the laser spot diameter of a 50x objective is < 2 μm. The inclusion of a positioning table enables an object to be scanned whilst being observed by an integrated USB camera.