SolMates
SolMateS has received an order from SINTEF (Oslo, Norway) for its PiezoFlare 1200 Pulsed Laser Deposition (PLD) system. The system is scheduled for delivery in January 2013 and will be used for deposition of Piezoelectric materials (PZT) for development and pre-production of next generation MEMS applications.
“We are very pleased with SINTEF as launching customer, this order comes with a close collaboration between SolMateS and SINTEF to optimize our machine and process in their development line for multiple new MEMS applications,” commented Arjen Janssens. “The combination of our innovative tool and their expertise in PiezoMEMS development gives rise to a state-of-the-art PiezoMEMS centre in Europe.”
About the PiezoFlare 1200
The PiezoFlare 1200 is a revolutionary manufacturing technology to produce chips with precise actuation functionality for various new applications like, inkjet printheads, pico projectors, RF MEMS and various sensing applications. The PiezoFlare 1200 is an automated deposition system for PZT thin films on 6" or 8" wafers, based on pulsed laser deposition. The technology uses a laser to create a plasma of the to be deposited material, this has several significant advantages for the deposition of the new generation materials. The fully automated tool offers high-yield piezo performance and flexibility for customized PZT compositions and can also be used for other More than Moore materials.