
PI
With the P-763 piezo scanner, PI (Physik Instrumente) complements its product line of precision piezo-driven XY stages with clear aperture. This XY nano positioning system with 70 mm side length features a large 30 mm x 30 mm clear aperture and is suited for sample handling and positioning as well as for transmitted-light applications.
The P-763 is equipped with PICMA actuators for high reliability, capacitive sensors for high position stability and high resolution, as well as frictionless flexure joints. With these technical features, the P-763 achieves a 200 µm travel range per axis with a non-linearity of 0.02% and a resolution below 1 nm.
The resonant frequency of 180 Hz achieved at this long 200 µm travel range is high and allows for a large dynamic bandwidth of the positioning system. For attaining the system's elevated stiffness, PICMA actuators with a large footprint were selected. For a highly dynamic, nanometer-precise operation the P-763 is suited for control with the powerful E-709.CHG digital controller.