BioMEMS are a special area of micro systems, combining fluidic devices with micro nano systems. Modelling such devices, in the development phase, must account for all the phenomena from both worlds. more

Jun 6, 2014 2:58 PM articles

SPTS Technologies and imec have announced a joint partnership to further advance micro and nanosized components for BioMEMS, using SPTS’ Si DRIE technology. more

Oct 15, 2013 12:11 PM mems