Oxford Instruments

The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden, Germany has installed a FlexAL system for plasma enhanced and thermal ALD from Oxford Instruments Plasma Technology in its Center for Nanoelectronic Technologies. Read more


The CiS Research Institute for Microsensor Systems and Photovoltaics GmbH, Germany, has recently placed an order with Oxford Instruments for a PlasmaPro100 Estrelas etch system for research and development of MEMS components. Read more