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Oxford Instruments

The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden, Germany has installed a FlexAL system for plasma enhanced and thermal ALD from Oxford Instruments Plasma Technology in its Center for Nanoelectronic Technologies. more

Jul 2, 2015 2:32 PM electronics

The CiS Research Institute for Microsensor Systems and Photovoltaics GmbH, Germany, has recently placed an order with Oxford Instruments for a PlasmaPro100 Estrelas etch system for research and development of MEMS components. more

Jul 14, 2014 11:49 AM mems