MEMS 2026

Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the forum to present over 200 select papers in non-overlapping oral and poster sessions. Its single-session format provides ample opportunity for interaction between attendees, presenters and exhibitors. The 39th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2026) is one of the premier annual events reporting research results on every aspect of MEMS and Microsystems technology, as well as their relevant technologies and industrial trends. In particular, IEEE MEMS 2026 will bring more industrial elements to broaden the impact towards various application scenarios, showing its significance on more-than-Moore era. IEEE MEMS 2026 will be held in Salzburg, Austria, from 25 - 29 January 2026 The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:

• Design, simulation and analysis tools with experimental verification
• Fabrication technologies and processes
• Silicon and non-silicon materials
• Electro-mechanical integration techniques
• Assembly and packaging approaches
• Metrology and operational evaluation techniques
• System architecture