Renishaw, a global leader in engineering technologies, has launched a new family of RLE laser interferometer encoder systems. The new product range comprises three systems – RLE100, RLE200 and RLE300 – providing precision position feedback for a wide range of semiconductor manufacturing motion control applications. The new RLE family will be showcased at SEMICON Taiwan 2026 and SEMICON West 2026.
Building on the proven technology platforms of Renishaw's established RLE10 and RLE20 laser encoders, the new family is designed to meet the increasing demands of advanced semiconductor manufacturing equipment. As device feature sizes continue to shrink, manufacturers require higher levels of positioning accuracy, stability and productivity from their motion control systems. The new RLE laser encoder range delivers enhanced metrology performance, flexible design integration and fast system set-up and optimisation, enabling machine builders to meet these evolving requirements.
A key advantage of the next-generation technology is its modular plug-and-play architecture. Laser units, detector heads and fibre assemblies can be replaced independently, reducing maintenance overheads and simplifying inventory management. New detachable optical fibres allow laser units to be replaced without disturbing the installed fibres or detector heads, enabling quick servicing without lengthy realignment procedures.
The new laser encoder family also introduces enhanced diagnostics and condition monitoring capabilities. To help improve predictive maintenance and maximise machine uptime, users can access real-time system information through an integrated diagnostic interface, including signal quality, operating status, and fault reporting.
The RLE100 system is the direct successor to the RLE10 system, offering equivalent measurement performance (laser frequency stability) for in-air applications. The RLE200 system replaces the RLE20 system as the recommended solution for higher-performance applications, particularly those operating in vacuum environments, and incorporates new automatic Sub-Divisional Error (SDE) correction. The new systems are compatible with existing mechanical mounting arrangements, allowing users to upgrade with minimal disruption and without machine redesign.
Completing the range, the new RLE300 laser encoder provides even higher metrology performance for the most demanding semiconductor manufacturing applications. Enhanced frequency stability, reduced electronic noise, and automatic SDE correction enable the system to achieve exceptionally low measurement uncertainty down to ±0.2 nm. This enables highly reliable position feedback for high-precision, thermally-critical, or ultra-stable environments.
The operating range of these new laser encoders has been doubled to an angular range of ±400 µrad and linear range of 2 m. Further improvements include simplified beam alignment through a redesigned beam-steering mechanism, improved clean-room compatibility, and support for higher stage velocities through new detector head options. These enhancements make the laser encoders easier to integrate, faster to commission, and more robust in demanding semiconductor manufacturing environments.
‘Renishaw's new RLE laser encoder family has been developed to give semiconductor equipment manufacturers a straightforward upgrade path from existing systems while providing the enhanced performance, serviceability and flexibility needed for future generations of precision motion platforms,’ said Dr Costantino Corbari, Laser Encoder Design Manager at Renishaw. ‘From the drop-in replacement capabilities of the RLE100 and RLE200 through to the ultra-high performance of the RLE300, the range is designed to help customers achieve greater precision with less complexity.’
For further information on the next generation of RLE laser interferometer encoders, visit www.renishaw.com/laserencoders